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Materials for Semiconductor Manufacturing Equipment：Corrosion Resistant Alloys
Corrosion Resistant Alloys (Corrosion Resistant Alloys, Titanium Alloys) Map
Lineup
Applied to components requiring higher corrosion resistance.
| Alloy | UNS Alloy Symbol (JIS Alloy Symbol) |
Equivalent Alloy |
Examples of Applicable Components (※) |
Available Products | Specifications | |||
|---|---|---|---|---|---|---|---|---|
| Bar | Wire rod | Strip | ASTM | JIS | ||||
| DSALOY200 | N02200 (NW2200) |
Nickel200 | Filter Material, Gasket | ◎ | ◎ | ◎ | B160 B162 |
G4902 H4553 H4554 |
| DSALOY201 | N02201 (NW2201) |
Nickel201 | Filter Material, Gasket | ◎ | ◎ | ◎ | B160 B162 |
G4902 H4553 H4554 |
| DSALOY400 | N04400 (NW4400) |
Monel400 | Seal | ◎ | ◎ | ◎ | B127 B164 B564 |
G4902 H4553 H4554 |
| DSALOYK-500 | N05500 (NW5500) |
- | Valves, fittings, | 〇 | - | - | B865 | H4553 |
| DSALOY600 | N06600 (NCF600) |
Inconel 600 | Valves, regulators, diaphragms, | ◎ | ◎ | ◎ | B166 B168 B564 |
G4901 G4902 |
| DSA760 | - | - | ○ | ◎ | - | - | - | |
| DSALOY625 | N06625 (NCF625) |
Inconel 625 | Valves, fittings, pipes. | ◎ | ◎ | ◎ | B443 B446 B564 |
G4901 G4902 |
| DSALOYC-276 | N10276 (NW0276) |
Hastelloy C-276 | Valves, fittings, pipes. | ◎ | ◎ | ◎ | B564 B574 B575 |
G4902 H4553 H4554 |
| DSALOY22 | N06022 (NW6022) |
Hastelloy C-22 | Valves, fittings, pipes.diaphragms, | ◎ | ◎ | ◎ | B564 B574 B575 |
G4902 H4553 H4554 |
| DSALOYCB3 | N08020 | - | Valves, fittings, | ◎ | ◎ | - | B472 B473 |
- |
- ※Examples of applicable components are extracted from practical examples and SEMI F105 (Guide for Metallic Material Compatibility in Gas Distribution Systems).
- ※For detailed information on possible manufacturing shapes, please contact us individually.
◎：Standard 〇：Available -：Not Available - ※Nickel, Monel, and Inconel are registered trademarks of Special Metals Corporation.
- ※Hastelloy is a registered trademark of Haynes International, Inc.
Chemical Composition
| Alloy | UNS (JIS) |
Equivalent Alloy |
Nominal Chemical Composition (wt%) | |||||
|---|---|---|---|---|---|---|---|---|
| Ni | Cr | Mo | Co | Fe | others | |||
| DSALOY200 | N02200 (NW2200) |
Nickel200 | ≧99.0 | - | - | - | ≦0.4 | C≦0.15 Cu≦0.2 |
| DSALOY201 | N02201 (NW2201) |
Nickel201 | ≧99.0 | - | - | - | ≦0.4 | C≦0.02 Cu≦0.2 |
| DSALOY400 | N04400 (NW4400) |
Monel400 | ≧63.0 | - | - | - | ≦2.5 | Cu 28.0-34.0 |
| DSALOYK-500 | N05500 (NW5500) |
- | Bal. | - | - | - | ≦2.0 | Cu 27.0-34.0 Al 2.2-3.2 Ti 0.35-0.85 |
| DSALOY600 | N06600 (NCF600) |
Inconel 600 | ≧72.0 | 14.0- 17.0 |
- | - | 6.0-10.0 | Cu≦0.50 |
| DSA760 | - | - | bal. | (38) | - | - | - | (Al 3.8) |
| DSALOY625 | N06625 (NCF625) |
Inconel 625 | ≧58.0 | 20.0-23.0 | 8.0-10.0 | ≦1.0 | ≦5.0 | Al≦0.40 Ti≦0.40 Nb+Ta 3.15-4.15 |
| DSALOY C-276 | N10276 (NW0276) |
Hastelloy C-276 | bal. | 14.5-16.5 | 15.0-17.0 | ≦2.5 | 4.0-7.0 | W 3.0-4.5 V≦0.35 |
| DSALOY 22 | N06022 (NW6022) |
Hastelloy C-22 | bal. | 20.0-22.5 | 12.5-14.5 | ≦2.5 | 2.0-6.0 | W 2.5-3.5 V≦0.35 |
| DSALOYCB3 | N08020 | - | 32.0-38.0 | 19.0-21.0 | 2.0-3.0 | - | bal. | Cu 3.0-4.0 Nb≦1.0 |
- ※Nickel, Monel, and Inconel are registered trademarks of Special Metals Corporation.
- ※Hastelloy is a registered trademark of Haynes International, Inc.
Other Characteristics
| Alloy | Heat Treatment | Tensile Strength (N/mm2) |
Elongation (%) |
|---|---|---|---|
| DSALOY200 | A | ≧380 | ≧30 |
| DSALOY201 | A | ≧340 | ≧30 |
| DSALOY400 | A | ≧480 | ≧35 |
| DSALOYK-500 | ST+AG | ≧830 | ≧15 |
| DSALOY600 | A | ≧550 | ≧30 |
| DSA760 | ST+AG | ≧1,500 | - |
| DSALOY625 | A | ≧760 | ≧30 |
| DSALOY C-276 | A | ≧690 | ≧40 |
| DSALOY 22 | A | ≧690 | ≧45 |
| DSALOYCB3 | ST | ≧550 | ≧30 |
| Alloy | General Characteristics of Alloys |
|---|---|
| DSALOY200 | It is a general pure Ni wrought material with good mechanical properties and excellent corrosion resistance in many corrosive media |
| DSALOY201 | It is a pure Ni wrought material similar to DSALOY200, but with a lower C% (carbon content), which prevents embrittlement due to carbon at temperatures above 300℃, and also exhibits excellent cold workability. |
| DSALOY400 | It is one of the widely used Ni alloys for a long time. It has high strength, good workability, and excellent corrosion resistance in a wide range of environments such as seawater, acids, and alkalis. |
| DSALOYK-500 | It is a precipitation strengthened alloy with corrosion resistance, high strength, and high hardness equivalent to DSALOY400, and it remains completely non-magnetic even at extremely low temperatures of -100℃. |
| DSALOY600 | It has excellent oxidation resistance at high temperatures, strong resistance to stress corrosion cracking caused by Cl- ions, and superior corrosion resistance in high purity water and alkalis. |
| DSA760 | This is a precipitation-hardened Ni-Cr alloy with non-magnetic properties, high hardness, and excellent corrosion resistance. Its hardness is comparable to that of martensitic stainless steel. |
| DSALOY625 | This is a solid-solution strengthened Ni-Cr-Mo alloy with added Nb that exhibits high strength without heat treatment and has excellent corrosion resistance in a wide range of harsh environments. |
| DSALOY C-276 | It has excellent corrosion resistance in a wide range of harsh environments and good weldability. |
| DSALOY 22 | This is a Ni-Cr-Mo alloy with added W, which has excellent corrosion resistance against all types of corrosion in both reducing and oxidizing environments. |
| DSALOYCB3 | This is a Ni-Fe-Cr alloy containing Cu, Mo, and Nb, which has excellent resistance to general corrosion, pitting, crevice corrosion, and intergranular corrosion in solutions containing a wide range of acids. |
Corrosion Resistance Comparison (ABC Evaluation)
| Material | Sulfuric Acid (RT5%) |
Sulfuric Acid (Boil5%) |
Hydrochloric Acid (RT36%) |
Hydrochloric Acid (Boil1%) |
Hydrofluoric Acid (50℃20%) |
Phosphoric Acid (boil85%) |
Nitric Acid (40℃6%) |
|---|---|---|---|---|---|---|---|
| DSALOY 201 | B | B | C | C | A | C | C |
| DSALOY 22 | A | A | A | A | A | A | A |
| DSALOYC-276 | A | A | A | A | A | A | B |
| DSALOY 400 | B | A | B | A | A | A | C |
| DSALOY K-500 | B | A | B | A | A | A | C |
| DSALOY 600 | B | B | C | B | B | B | C |
| DSALOY 625 | A | A | A | A | B | A | A |
| DSA760 | A | C | C | B | A | C | B |
| DSALOYCB3 | A | A | B | B | A | B | A |
| SUS304 | B | C | C | C | C | B | A |
| SUS316 | A | B | B | C | C | C | A |
A: No corrosion (usable), B: Some corrosion, C: Corrosion present (not usable)
